Thermodynamics of the production of condensed phases in the chemical vapor deposition of ZrC in the ZrCl4–CH4–H2–Ar system

标题
Thermodynamics of the production of condensed phases in the chemical vapor deposition of ZrC in the ZrCl4–CH4–H2–Ar system
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 558, Issue -, Pages 462-467
出版商
Elsevier BV
发表日期
2014-03-21
DOI
10.1016/j.tsf.2014.03.023

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