Influence of sputtering pressure on the structural, optical and hydrophobic properties of sputtered deposited HfO2 coatings

标题
Influence of sputtering pressure on the structural, optical and hydrophobic properties of sputtered deposited HfO2 coatings
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 549, Issue -, Pages 2-7
出版商
Elsevier BV
发表日期
2013-07-14
DOI
10.1016/j.tsf.2013.07.016

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