Al2O3/Ag/Al2O3 multilayer thin film passivation prepared by plasma damage-free linear facing target sputtering for organic light emitting diodes

标题
Al2O3/Ag/Al2O3 multilayer thin film passivation prepared by plasma damage-free linear facing target sputtering for organic light emitting diodes
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 547, Issue -, Pages 63-67
出版商
Elsevier BV
发表日期
2013-05-15
DOI
10.1016/j.tsf.2013.05.003

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