Formation of stoichiometric, sub-stoichiometric undoped and hydrogen doped tungsten oxide films, enabled by pulsed introduction of O2 or H2 during hot-wire vapor deposition

标题
Formation of stoichiometric, sub-stoichiometric undoped and hydrogen doped tungsten oxide films, enabled by pulsed introduction of O2 or H2 during hot-wire vapor deposition
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 537, Issue -, Pages 124-130
出版商
Elsevier BV
发表日期
2013-04-22
DOI
10.1016/j.tsf.2013.04.021

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