All hot wire chemical vapor deposition low substrate temperature transparent thin film moisture barrier

标题
All hot wire chemical vapor deposition low substrate temperature transparent thin film moisture barrier
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 532, Issue -, Pages 84-88
出版商
Elsevier BV
发表日期
2012-12-22
DOI
10.1016/j.tsf.2012.11.146

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