4.4 Article

First-principle study of amorphous SiZnSnO thin-film transistor with excellent stability

期刊

THIN SOLID FILMS
卷 534, 期 -, 页码 609-613

出版社

ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2013.02.033

关键词

Oxide semiconductor; Thin film transistor; In-free; Mobility; Stability

资金

  1. Korea Institute of Science and Technology (KIST) [2E22731]
  2. IT R&D Program of MKE/IITA [KI002182]
  3. Korea National Research Foundation [2012-0000345]

向作者/读者索取更多资源

We find that an incorporation of the small amount of Si in the ZnSnO stabilizes the device performance significantly. Through the first-principle calculation, we find that the formation of O-deficient states is easily suppressed by Si-doping due to the volume shrinkage effect, which leads to the stable device operation. This behavior is consistent with the X-ray photoelectron spectroscopy measured data. (C) 2013 Elsevier B. V. All rights reserved.

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