Influence of thermal treatment in N2 atmosphere on chemical, microstructural and optical properties of indium tin oxide and nitrogen doped indium tin oxide rf-sputtered thin films

标题
Influence of thermal treatment in N2 atmosphere on chemical, microstructural and optical properties of indium tin oxide and nitrogen doped indium tin oxide rf-sputtered thin films
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 541, Issue -, Pages 121-126
出版商
Elsevier BV
发表日期
2012-12-16
DOI
10.1016/j.tsf.2012.11.135

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