Atomic layer deposition grown composite dielectric oxides and ZnO for transparent electronic applications

标题
Atomic layer deposition grown composite dielectric oxides and ZnO for transparent electronic applications
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 520, Issue 14, Pages 4694-4697
出版商
Elsevier BV
发表日期
2011-11-04
DOI
10.1016/j.tsf.2011.10.151

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