Epitaxial growth and electrical measurement of single crystalline Pb(Zr0.52Ti0.48)O3 thin film on Si(001) for micro-electromechanical systems

标题
Epitaxial growth and electrical measurement of single crystalline Pb(Zr0.52Ti0.48)O3 thin film on Si(001) for micro-electromechanical systems
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 520, Issue 14, Pages 4572-4575
出版商
Elsevier BV
发表日期
2011-12-08
DOI
10.1016/j.tsf.2011.11.073

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