期刊
THIN SOLID FILMS
卷 520, 期 6, 页码 1997-2000出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2011.09.055
关键词
Barium titanate; Interface; Rutherford Backscattering Spectrometry (RBS); Thin films; Diffusion; X-ray photoelectron spectroscopy (XPS); Interphase growth
Interdiffusion at interfaces between several materials in integrated structures is becoming more and more challenging. We performed a deep study of diffusion in BaTiO3/Si films using X-Ray Diffraction analysis, Rutherford Backscattering Spectrometry and X-ray Photoelectron Spectroscopy at intermediate annealing stages. We show that controlling local chemistry through inter-diffusion phenomena at interfaces is possible thanks to the structural and chemical matching between BaTiO3 and fresnoite. BaTiO3/Si stacks can serve as a model system to investigate the interphase generation at interfaces. (C) 2011 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据