Low temperature stabilized rutile phase TiO2 films grown by sputtering - Peeref

标题

Low temperature stabilized rutile phase TiO2 films grown by sputtering

作者

关键词

-

出版物

THIN SOLID FILMS

Volume 520, Issue 6, Pages 1809-1813

出版商

Elsevier BV

发表日期

2011-09-07

DOI

10.1016/j.tsf.2011.08.106

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