The effect of deposition parameters and post treatment on the electrical properties of Mo thin films

标题
The effect of deposition parameters and post treatment on the electrical properties of Mo thin films
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 520, Issue 18, Pages 5936-5939
出版商
Elsevier BV
发表日期
2012-05-24
DOI
10.1016/j.tsf.2012.05.027

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