Properties of polyimide/Al2O3 and Si3N4 deposited thin films

标题
Properties of polyimide/Al2O3 and Si3N4 deposited thin films
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 519, Issue 15, Pages 4969-4973
出版商
Elsevier BV
发表日期
2011-01-15
DOI
10.1016/j.tsf.2011.01.063

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