In-situ inspection of cracking in atomic-layer-deposited barrier films on surface and in buried structures

出版年份 2011 全文链接

标题

In-situ inspection of cracking in atomic-layer-deposited barrier films on surface and in buried structures

作者

关键词

-

出版物

THIN SOLID FILMS

Volume 520, Issue 1, Pages 251-257

出版商

Elsevier BV

发表日期

2011-08-03

DOI

10.1016/j.tsf.2011.07.056

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Protocol

Reagent

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