Formation and photoluminescence of Si nanocrystals in controlled multilayer structure comprising of Si-rich nitride and ultrathin silicon nitride barrier layers

标题
Formation and photoluminescence of Si nanocrystals in controlled multilayer structure comprising of Si-rich nitride and ultrathin silicon nitride barrier layers
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 519, Issue 16, Pages 5408-5412
出版商
Elsevier BV
发表日期
2011-02-27
DOI
10.1016/j.tsf.2011.02.060

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