Surface poisoning in the nucleation and growth of palladium atomic layer deposition with Pd(hfac)2 and formalin

标题
Surface poisoning in the nucleation and growth of palladium atomic layer deposition with Pd(hfac)2 and formalin
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 519, Issue 16, Pages 5339-5347
出版商
Elsevier BV
发表日期
2011-02-26
DOI
10.1016/j.tsf.2011.02.037

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