Characteristics and applications of plasma enhanced-atomic layer deposition

标题
Characteristics and applications of plasma enhanced-atomic layer deposition
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 519, Issue 20, Pages 6639-6644
出版商
Elsevier BV
发表日期
2011-02-13
DOI
10.1016/j.tsf.2011.01.404

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