Structure and properties of CrAlSiN Nanocomposite coatings deposited by lateral rotating cathod arc

标题
Structure and properties of CrAlSiN Nanocomposite coatings deposited by lateral rotating cathod arc
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 519, Issue 6, Pages 1894-1900
出版商
Elsevier BV
发表日期
2010-10-22
DOI
10.1016/j.tsf.2010.10.022

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