Power and pressure effects upon magnetron sputtered aluminum doped ZnO films properties

出版年份 2010 全文链接

标题

Power and pressure effects upon magnetron sputtered aluminum doped ZnO films properties

作者

关键词

-

出版物

THIN SOLID FILMS

Volume 519, Issue 1, Pages 5-10

出版商

Elsevier BV

发表日期

2010-07-16

DOI

10.1016/j.tsf.2010.06.063

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Protocol

Reagent

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