Structure and mechanical properties of low temperature magnetron sputtered nanocrystalline (nc-)Ti(N,C)/amorphous diamond like carbon (a-C:H) coatings

标题
Structure and mechanical properties of low temperature magnetron sputtered nanocrystalline (nc-)Ti(N,C)/amorphous diamond like carbon (a-C:H) coatings
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 519, Issue 1, Pages 24-30
出版商
Elsevier BV
发表日期
2010-07-16
DOI
10.1016/j.tsf.2010.07.049

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