Structure and property changes of ZrO2/Al2O3/ZrO2 laminate induced by low-temperature NH3 annealing applicable to metal–insulator–metal capacitor

标题
Structure and property changes of ZrO2/Al2O3/ZrO2 laminate induced by low-temperature NH3 annealing applicable to metal–insulator–metal capacitor
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 518, Issue 18, Pages 5272-5277
出版商
Elsevier BV
发表日期
2010-04-15
DOI
10.1016/j.tsf.2010.04.017

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