Synthesis and characterization of DC magnetron sputtered ZnO thin films under high working pressures

标题
Synthesis and characterization of DC magnetron sputtered ZnO thin films under high working pressures
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 518, Issue 24, Pages e161-e164
出版商
Elsevier BV
发表日期
2010-03-31
DOI
10.1016/j.tsf.2010.03.091

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