Growth and characterization of stoichiometric BCN films on highly oriented pyrolytic graphite by radiofrequency plasma enhanced chemical vapor deposition

标题
Growth and characterization of stoichiometric BCN films on highly oriented pyrolytic graphite by radiofrequency plasma enhanced chemical vapor deposition
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 518, Issue 15, Pages 4163-4169
出版商
Elsevier BV
发表日期
2009-12-04
DOI
10.1016/j.tsf.2009.11.086

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