Growth of RuO2 thin films by liquid injection atomic layer deposition

标题
Growth of RuO2 thin films by liquid injection atomic layer deposition
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 518, Issue 16, Pages 4701-4704
出版商
Elsevier BV
发表日期
2009-12-12
DOI
10.1016/j.tsf.2009.12.063

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