Atomic layer deposition of HfO2 on self-assembled monolayer-passivated Ge surfaces

标题
Atomic layer deposition of HfO2 on self-assembled monolayer-passivated Ge surfaces
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 518, Issue 15, Pages 4126-4130
出版商
Elsevier BV
发表日期
2009-11-18
DOI
10.1016/j.tsf.2009.11.015

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