Preparation and characterization of TaAlOx high-κ dielectric for metal–insulator–metal capacitor applications

标题
Preparation and characterization of TaAlOx high-κ dielectric for metal–insulator–metal capacitor applications
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 519, Issue 1, Pages 423-429
出版商
Elsevier BV
发表日期
2010-07-14
DOI
10.1016/j.tsf.2010.07.020

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