4.4 Article

Non-catalytic growth of graphene-like thin film near pattern edges fabricated on SiO2 substrates

期刊

THIN SOLID FILMS
卷 518, 期 18, 页码 5040-5043

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ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2010.02.027

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Carbon; Chemical vapor deposition; Raman scattering; Electrical properties and measurements; Scanning electron microscopy

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Graphene-like thin films were grown on patterned SiO2 substrates by simple thermal chemical vapor deposition using ethanol. The film growth occurred preferentially in the vicinity of pattern edges. Catalytic metal is not necessary for the substrate or the pattern. The films consist of graphitic nanocrystals of several nanometer scale. In the electric properties, the field effect is observed at room temperature. (c) 2010 Elsevier B.V. All rights reserved.

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