High quality ZnO:Al transparent conducting oxide films synthesized by pulsed filtered cathodic arc deposition

标题
High quality ZnO:Al transparent conducting oxide films synthesized by pulsed filtered cathodic arc deposition
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 518, Issue 12, Pages 3313-3319
出版商
Elsevier BV
发表日期
2009-10-15
DOI
10.1016/j.tsf.2009.10.006

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