Direct patterning of double-layered metal thin films by a pulsed Nd:YAG laser beam

出版年份 2009 全文链接

标题

Direct patterning of double-layered metal thin films by a pulsed Nd:YAG laser beam

作者

关键词

-

出版物

THIN SOLID FILMS

Volume 518, Issue 10, Pages 2775-2778

出版商

Elsevier BV

发表日期

2009-10-17

DOI

10.1016/j.tsf.2009.10.018

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