Atomic layer deposition of MnO using Bis(ethylcyclopentadienyl)manganese and H2O

出版年份 2009 全文链接

标题

Atomic layer deposition of MnO using Bis(ethylcyclopentadienyl)manganese and H2O

作者

关键词

-

出版物

THIN SOLID FILMS

Volume 517, Issue 19, Pages 5658-5665

出版商

Elsevier BV

发表日期

2009-02-16

DOI

10.1016/j.tsf.2009.02.050

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