Fabrication of epitaxial ZnO films by atomic-layer deposition with interrupted flow

标题
Fabrication of epitaxial ZnO films by atomic-layer deposition with interrupted flow
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 518, Issue 5, Pages 1373-1376
出版商
Elsevier BV
发表日期
2009-09-18
DOI
10.1016/j.tsf.2009.09.018

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