Oxidation resistance of TiN, CrN, TiAlN and CrAlN coatings deposited by lateral rotating cathode arc

标题
Oxidation resistance of TiN, CrN, TiAlN and CrAlN coatings deposited by lateral rotating cathode arc
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 517, Issue 17, Pages 4845-4849
出版商
Elsevier BV
发表日期
2009-03-17
DOI
10.1016/j.tsf.2009.03.038

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