Influence of substrate temperature and Zn-precursors on atomic layer deposition of polycrystalline ZnO films on glass

标题
Influence of substrate temperature and Zn-precursors on atomic layer deposition of polycrystalline ZnO films on glass
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 517, Issue 10, Pages 3138-3142
出版商
Elsevier BV
发表日期
2008-11-22
DOI
10.1016/j.tsf.2008.11.088

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