Transparent amorphous In–Ga–Zn–O thin film as function of various gas flows for TFT applications

标题
Transparent amorphous In–Ga–Zn–O thin film as function of various gas flows for TFT applications
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 517, Issue 14, Pages 4078-4081
出版商
Elsevier BV
发表日期
2009-02-09
DOI
10.1016/j.tsf.2009.01.166

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