Stress and strain in titanium nitride thin films

标题
Stress and strain in titanium nitride thin films
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 517, Issue 20, Pages 5888-5893
出版商
Elsevier BV
发表日期
2009-04-15
DOI
10.1016/j.tsf.2009.04.020

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