Ru thin film grown on TaN by plasma enhanced atomic layer deposition

标题
Ru thin film grown on TaN by plasma enhanced atomic layer deposition
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 517, Issue 16, Pages 4689-4693
出版商
Elsevier BV
发表日期
2009-03-10
DOI
10.1016/j.tsf.2009.03.001

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