Thin films of In2O3 by atomic layer deposition using In(acac)3

标题
Thin films of In2O3 by atomic layer deposition using In(acac)3
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 517, Issue 23, Pages 6320-6322
出版商
Elsevier BV
发表日期
2009-02-17
DOI
10.1016/j.tsf.2009.02.059

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