Nanoindentation and nanoscratch behaviour of reactive sputtered deposited W–S–C film

标题
Nanoindentation and nanoscratch behaviour of reactive sputtered deposited W–S–C film
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 518, Issue 1, Pages 185-193
出版商
Elsevier BV
发表日期
2009-06-24
DOI
10.1016/j.tsf.2009.06.027

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