4.4 Article

Influence of thickness and growth temperature on the optical and electrical properties of ZnO thin films

期刊

THIN SOLID FILMS
卷 517, 期 15, 页码 4303-4306

出版社

ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2008.11.143

关键词

Zinc oxide; Pulsed laser deposition; Optical properties; Electrical properties

资金

  1. National Funded Project PENED [2003-03EDelta733]

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Zinc oxide transparent conductive thin films were prepared using the pulsed laser deposition technique onto Corning glass substrates and the dependences of their optical and electrical properties on the thickness and the growth temperature were investigated. As shown, the films present 90% average transmittance, their energy gap position depending on the film thickness and the growth temperature. An additional absorption band was also observed near 3.44 eV, the position of its maximum also depending on the growth parameters. Finally, the electrical properties of the films were found to be affected mainly by the growth temperature and less by the thickness. (C) 2008 Elsevier B.V. All rights reserved.

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