Mechanical properties and phase structure of (TiAlZr)N films deposited by multi arc ion plating

标题
Mechanical properties and phase structure of (TiAlZr)N films deposited by multi arc ion plating
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 517, Issue 17, Pages 4830-4834
出版商
Elsevier BV
发表日期
2009-03-17
DOI
10.1016/j.tsf.2009.03.051

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