期刊
THIN SOLID FILMS
卷 517, 期 5, 页码 1607-1609出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2008.09.076
关键词
Scandium nitride; Yttrium nitride; Nitride alloys; III-V semiconductors; Optoelectronic devices; Sputtering
类别
资金
- NSF [EEC-0117770, DMR 0520404, ECS-0335765]
The refractory nitrides ScN and YN are candidate semiconductors for optoelectronic and DMS applications. Studies have included alloying ScN with other III-V semiconductors such as GaN to engineer the electronic, optical and structural properties. We suggest that ScN-YN and higher order alloys will lead to further control of these properties. We demonstrate complete solid solubility in the ScN-YN system through analysis of sputter deposited composition-spread thin films. Characterization of electrical, optical and structural properties is presented as a function of composition, demonstrating excellent epitaxy, high mobility, high absorptivity and high energy optical gap across the entire composition range. (C) 2008 Elsevier B.V. All rights reserved.
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