期刊
THIN SOLID FILMS
卷 517, 期 19, 页码 5625-5629出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2009.02.022
关键词
Electrochemical deposition; Diamond; Crystalites; Microstructure
类别
资金
- National Natural Science Foundation of China (NSFC) [50525515, 50721004]
- National Basic Research Program of China [2003CB716205]
Carbon films containing diamond particles were deposited onto a Si (100) substrate by electrolysis of methanol under a direct current potential of 1200 V, with a current density of about 52 mA/cm(2), at atmospheric pressure and in the temperature range of 50-55 degrees C. The surface morphology, microstructure and crystalline structure of the deposited films were characterized by scanning electron microscopy (SEM), Fourier transformation infrared (FTIR) spectroscopy, Raman spectroscopy and transmission electron microscopy (TEM) respectively. The SEM images show that the films are formed by particle clusters and a surrounding glassy phase. The Raman spectra of the films indicate that the particle clusters are composed of diamond and that the glassy phase is composed of amorphous carbon. The FTIR measurements suggest the existence of hydrogen which is mainly bonded to the sp(3) carbon in the films. The transmission electron diffraction patterns further indicate that the particles in the films consist of single-crystalline diamond. Both TEM and Raman measurements have confirmed unambiguously the formation of diamond crystals in the deposit, although the particles are not uniformly distributed on the entire surface. (C) 2009 Elsevier B.V. All rights reserved.
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