In-situ electrical characterization of ultrathin TiN films grown by reactive dc magnetron sputtering on SiO2

标题
In-situ electrical characterization of ultrathin TiN films grown by reactive dc magnetron sputtering on SiO2
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 517, Issue 24, Pages 6731-6736
出版商
Elsevier BV
发表日期
2009-05-24
DOI
10.1016/j.tsf.2009.05.028

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