Sputter deposition of titanium monoxide and dioxide thin films with controlled properties using optical emission spectroscopy

标题
Sputter deposition of titanium monoxide and dioxide thin films with controlled properties using optical emission spectroscopy
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 516, Issue 23, Pages 8473-8478
出版商
Elsevier BV
发表日期
2008-05-04
DOI
10.1016/j.tsf.2008.04.093

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