Influence of bias voltages on the structure and wear properties of TiSiN coating synthesized by cathodic arc plasma evaporation

标题
Influence of bias voltages on the structure and wear properties of TiSiN coating synthesized by cathodic arc plasma evaporation
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 516, Issue 16, Pages 5324-5329
出版商
Elsevier BV
发表日期
2007-07-14
DOI
10.1016/j.tsf.2007.07.087

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