Deposition and dielectric properties of CaCu3Ti4O12 thin films deposited on Pt/Ti/SiO2/Si substrates using radio frequency magnetron sputtering

标题
Deposition and dielectric properties of CaCu3Ti4O12 thin films deposited on Pt/Ti/SiO2/Si substrates using radio frequency magnetron sputtering
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 516, Issue 10, Pages 2874-2880
出版商
Elsevier BV
发表日期
2007-06-08
DOI
10.1016/j.tsf.2007.05.060

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