Selective-area atomic layer deposition with microcontact printed self-assembled octadecyltrichlorosilane monolayers as mask layers

标题
Selective-area atomic layer deposition with microcontact printed self-assembled octadecyltrichlorosilane monolayers as mask layers
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 517, Issue 2, Pages 972-975
出版商
Elsevier BV
发表日期
2008-09-12
DOI
10.1016/j.tsf.2008.08.191

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