Nitrogen-rich plasma polymers: Comparison of films deposited in atmospheric- and low-pressure plasmas

标题
Nitrogen-rich plasma polymers: Comparison of films deposited in atmospheric- and low-pressure plasmas
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 516, Issue 21, Pages 7406-7417
出版商
Elsevier BV
发表日期
2008-03-06
DOI
10.1016/j.tsf.2008.02.033

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