Conformal ZnO coatings on high surface area silica gel using atomic layer deposition

标题
Conformal ZnO coatings on high surface area silica gel using atomic layer deposition
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 516, Issue 18, Pages 6158-6166
出版商
Elsevier BV
发表日期
2007-11-27
DOI
10.1016/j.tsf.2007.11.044

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