Characterization and gas-sensing behavior of an iron oxide thin film prepared by atomic layer deposition

标题
Characterization and gas-sensing behavior of an iron oxide thin film prepared by atomic layer deposition
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 516, Issue 18, Pages 6110-6115
出版商
Elsevier BV
发表日期
2007-11-27
DOI
10.1016/j.tsf.2007.11.011

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